The basis of SpeeFam's single side surfacing is FAM processing. FAM is a highly efficient technique, in which abrasive particles flow freely across the surface of a lapping plate. Hard Polishing, a high-precision process, finishes FAM processed workpieces into a lustrous mirror surface. Workpieces: Crystais, Ceramics, Ferrite, Metal, Semiconductor Wafers, Carbon, Piezoelectric Elements, Super-Hard Materials, Etc. Soft polish is an effective precision process for workpieces that require an even higher mirror type surface provided by hard polishing or for pieces which are easily damaged during processing. Incorporating a mechano chemical polishing technique, a polishing pad and special solution, along with years of experience in this sector, enable various materials to be finished to a mirror surface. Workpieces: Silicon Wafers, Compound Semiconductor Wafers, Oxide Wafers, Glass, Etc.